发明名称 CLEAN BENCH
摘要 PROBLEM TO BE SOLVED: To provide a clean bench according to class IIA, IIB1, IIB2 and IIB3 of JACA standard which is excellent in productivity and suitable for cost reduction. SOLUTION: In a clean bench, an air supply/exhaust unit 21 satisfying JACA standard and a standardized work room unit 1 are provided with a structure jointly connectable by using a connection structure in which a screw or welding is employed. In a connection part 3 of the both units, the space between the air supply/exhaust unit 21 including a work space and the air supply/exhaust unit 21 selectably configured is made negative pressure area to a space around the clean unit 1.
申请公布号 JP2002321174(A) 申请公布日期 2002.11.05
申请号 JP20020004835 申请日期 2002.01.11
申请人 HITACHI LTD 发明人 ICHIKI SHINGO;ONO KEIICHI
分类号 B25H1/20;B01L1/00;F24F7/06;(IPC1-7):B25H1/20 主分类号 B25H1/20
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