发明名称 METHOD AND DEVICE FOR MEASURING INTERNAL MACHINING PROCESS FOR TRANSPARENT SAMPLE BY LASER
摘要 <p>PROBLEM TO BE SOLVED: To provide a measuring method and device by which an internal machining process of a transparent sample can be observed in detail by laser. SOLUTION: In measuring an internal machining process of a transparent sample by laser, the device is equipped with a machining laser 1 for forming a fundamental wave for laser beam machining, a measuring laser 21 for forming a frequency-multiplied waves of the fundamental wave as a measuring beam, a time difference generator 22 for delaying the frequency-multiplied waves, a transparent sample 6 to be irradiated with the fundamental wave and the frequency-multiplied waves, a filter 9 for transmitting only a measuring beam from the transparent sample 6, and an image pickup unit 10 for picking up the image of the measuring beam passing the filter 9.</p>
申请公布号 JP2002336981(A) 申请公布日期 2002.11.26
申请号 JP20010140259 申请日期 2001.05.10
申请人 JAPAN SCIENCE & TECHNOLOGY CORP 发明人 ITO YOSHIRO;KIYOHISA SATOSHI;OGURA TSUTOMU
分类号 G01N21/41;B23K26/00;B23K26/02;B23K26/03;(IPC1-7):B23K26/00 主分类号 G01N21/41
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