发明名称 |
METAL SURFACE PROCESSING METHOD, METHOD OF MANUFACTURING MULTILAYER CIRCUIT SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR CHIP MOUNTING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR PACKAGE AND SEMICONDUCTOR PACKAGE |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a multilayer circuit board (motherboard or semiconductor chip mounting board) capable of ensuring high bonding strength between an interlayer insulating layer and wiring without forming an unevenness having a thickness of almost exceeding 1μm and efficiently transmitting a high-speed electric signal, and to provide a method of manufacturing a semiconductor package or the like. <P>SOLUTION: The method of manufacturing a multilayer wiring board for forming a plurality of interlayer insulating layers and wiring on one side or both sides of a core substrate has steps of processing the surface of the wiring with a solution containing an imidazole-type silane coupling agent, cleaning it with water, and then drying it at a temperature of less than 50°C. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
申请公布号 |
JP2004363364(A) |
申请公布日期 |
2004.12.24 |
申请号 |
JP20030160639 |
申请日期 |
2003.06.05 |
申请人 |
HITACHI CHEM CO LTD |
发明人 |
EJIRI YOSHINORI;INOUE FUMIO;URASAKI NAOYUKI;ITO TOYOKI;MATSUURA MASAHARU;NAKASO AKISHI |
分类号 |
C23C22/05;H01L23/12;H05K3/38;H05K3/46;(IPC1-7):H05K3/38 |
主分类号 |
C23C22/05 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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