| 摘要 |
A method for fabricating a single phase CuInS2 thin film by using an SEL(Stacked Elemental Layer) method is provided to improve quality of an optical device by using a chemical composition ratio of Cu, In, and S. A method for fabricating a single phase CuInS2 thin film by using an SEL method includes a quantitative process for obtaining a chemical composition ratio of Cu, In, and S. The fabricating method further includes a process for depositing Cu, In, and S by using a vacuum deposition device. A stacked SEL layer is obtained by performing a deposition process using the vacuum deposition device. The stacked SEL layer is formed with three layers. The single phase CuInS2 thin film is formed by performing a thermal process.
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