| 摘要 |
PROBLEM TO BE SOLVED: To provide a dryer for coated film shortening the length of the dryer in the vertical direction and making drying areas into multiple stages while suppressing particles from depositing to substrates in the drying areas. SOLUTION: In the dryer for coated film, the substrate 4 having top surface coated with coating liquid is disposed in the drying area 2 for performing heating and drying by heating means (hot plate) 3; two support means 5, 6 for supporting a substrate are configured to be relatively moved by drive means 7 to switch between a form for supporting the bottom surface of the substrate 4 by one support means 5 at a plurality of points and a form for supporting the bottom surface of the substrate 4 by the other support means 6 at a different plurality of points; and the drive means 7 is arranged in an outward area S of the peripheral edge of the drying area 2 viewed from above. COPYRIGHT: (C)2009,JPO&INPIT
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