发明名称 Semiconductor device and manufacturing method thereof
摘要 A method of manufacturing a semiconductor structure includes receiving a substrate including a die pad disposed thereon; disposing a passivation over the substrate and around the die pad; disposing a polymer over the passivation; forming a post passivation interconnect (PPI) including an elongated portion and a via portion contacting with the die pad; depositing a metallic paste on the elongated portion of the PPI by a stencil; disposing a conductive bump over the metallic paste; and disposing a molding over the PPI and around the metallic paste and the conductive bump.
申请公布号 US9379076(B2) 申请公布日期 2016.06.28
申请号 US201414503795 申请日期 2014.10.01
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. 发明人 Hsieh Chen-Chih;Tsai Hao-Yi;Shih Chao-Wen;Chiang Yung-Ping;Yu Tsung-Yuan
分类号 H01L23/31;H01L23/544;H01L21/78;H01L23/00;H01L23/522;H01L23/528;H01L21/56;H01L21/768 主分类号 H01L23/31
代理机构 WPAT, P.C. Intellectual Property Attorneys 代理人 WPAT, P.C. Intellectual Property Attorneys ;King Anthony
主权项 1. A method of manufacturing a semiconductor structure, comprising: receiving a substrate including a die pad disposed thereon; disposing a passivation over the substrate and around the die pad; disposing a polymer over the passivation; forming a post passivation interconnect (PPI) including an elongated portion and a via portion contacting with the die pad; depositing a metallic paste on the elongated portion of the PPI by a stencil including an aperture corresponding to a predetermined position of the elongated portion of the PPI; disposing a conductive bump over the metallic paste; and disposing a molding over the PPI and around the metallic paste and the conductive bump.
地址 Hsinchu TW