发明名称 |
Semiconductor device and manufacturing method thereof |
摘要 |
A method of manufacturing a semiconductor structure includes receiving a substrate including a die pad disposed thereon; disposing a passivation over the substrate and around the die pad; disposing a polymer over the passivation; forming a post passivation interconnect (PPI) including an elongated portion and a via portion contacting with the die pad; depositing a metallic paste on the elongated portion of the PPI by a stencil; disposing a conductive bump over the metallic paste; and disposing a molding over the PPI and around the metallic paste and the conductive bump. |
申请公布号 |
US9379076(B2) |
申请公布日期 |
2016.06.28 |
申请号 |
US201414503795 |
申请日期 |
2014.10.01 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. |
发明人 |
Hsieh Chen-Chih;Tsai Hao-Yi;Shih Chao-Wen;Chiang Yung-Ping;Yu Tsung-Yuan |
分类号 |
H01L23/31;H01L23/544;H01L21/78;H01L23/00;H01L23/522;H01L23/528;H01L21/56;H01L21/768 |
主分类号 |
H01L23/31 |
代理机构 |
WPAT, P.C. Intellectual Property Attorneys |
代理人 |
WPAT, P.C. Intellectual Property Attorneys ;King Anthony |
主权项 |
1. A method of manufacturing a semiconductor structure, comprising:
receiving a substrate including a die pad disposed thereon; disposing a passivation over the substrate and around the die pad; disposing a polymer over the passivation; forming a post passivation interconnect (PPI) including an elongated portion and a via portion contacting with the die pad; depositing a metallic paste on the elongated portion of the PPI by a stencil including an aperture corresponding to a predetermined position of the elongated portion of the PPI; disposing a conductive bump over the metallic paste; and disposing a molding over the PPI and around the metallic paste and the conductive bump. |
地址 |
Hsinchu TW |