Comb structure for a disk drive suspension piezoelectric microactuator operating in the D33 mode, and method of manufacturing the same

摘要

A microactuator assembly is formed by depositing PZT material over electrode gaps, the electrode gaps being defined by the spaces between interleaved fingers of metal that define alternating plus and minus electrodes. The PZT material is hardened and poled. The PZT material may be deposited and poled either as isolated islands of PZT material across respective electrode gaps, or as a continuous sheet of PZT material with localized areas of that material being poled and then activated. The individual PZT elements are arranged such that successive PZT elements extend in the same direction as across the electrode gaps. The resulting microactuator assembly acts in the d33 direction of the PZT elements. The electrodes have raised or recessed features such as ribs or castellations, with the PZT material mating with those features, thus anchoring the PZT material to the electrodes.

主权项

1. A microactuator assembly for a dual stage actuated disk drive suspension, the assembly comprising:
piezoelectric material extending generally in a horizontal plane; a plurality of first electrode fingers disposed generally in said horizontal plane and adjacent the piezoelectric material; a plurality of second electrode fingers disposed generally in said horizontal plane and adjacent the piezoelectric material, the first and second electrode fingers being interlaced to define an interlaced comb structure; the first electrode fingers and interconnections therebetween being formed integrally of a unitary piece of generally flat metal to define a first unitary electrode; the second electrode fingers and interconnections therebetween being formed integrally of a unitary piece of generally flat metal to define a second unitary electrode; the first and second unitary electrodes having respective first and second extension portions disposed at respectively opposite ends of the assembly, the extension portions being suitable for welding thereat.