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发明名称
HEAT-TREATMENT EQUIPMENT
摘要
申请公布号
JPH04275417(A)
申请公布日期
1992.10.01
申请号
JP19910036994
申请日期
1991.03.04
申请人
NEC CORP
发明人
KONO MICHIHISA
分类号
H01L21/26;H01L21/265
主分类号
H01L21/26
代理机构
代理人
主权项
地址
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