| 摘要 |
PURPOSE:To accurately measure the residual stress distribution of the fine part in the vicinity of the surface layer of a ceramic member in the depth direction thereof in a non-destructive manner. CONSTITUTION:A ceramic member 8 having a flat surface or a curved surface is irradiated with two or more kinds of X-rays different in penetration depth and a sin 2psi method is adapted to calculate the residual stress of the ceramic member from the obtained diffracted X-rays 9. From the calculated residual stress value and the respective penetration depths of X-rays, the residual stress gradient in the depth direction in the vicinity of the surface of the ceramics member 8 is calculated and the residual stress distribution of the ceramic member 8 in the depth direction is evaluated. |
