发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND ITS MANUFACTURE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor integrated circuit device which can perform assembly high in yield rate by stably mounting an elastic structure on a wiring board with high accuracy by the adoption of surface mounting structure, and stabilizing the bonding process of a semiconductor chip. SOLUTION: This is a ball grid array type of semiconductor package, and this is composed of a semiconductor chip 1 where a bonding pad is made, an elastomer 2 which is bonded to the semiconductor chip 1, a flexible wiring board 3 which is bonded to the elastomer 2 and in which wiring whose lead is connected to the bonding pad of the semiconductor pad 1 is made, a solder resist 4 which is made on the main surface of the flexible wiring board 3, and a bump 5 which is connected to the bump land of the wiring. This is the so- called surface wiring structure where the elastomer 2 is bonded to the semiconductor chip 1 side of the tape 9 of the flexible wiring board 3, and besides the solder resist 4 is made on the solder bump 5 side of the wiring 10.
申请公布号 JPH09260535(A) 申请公布日期 1997.10.03
申请号 JP19960066637 申请日期 1996.03.22
申请人 HITACHI LTD;HITACHI VLSI ENG CORP;HITACHI MICROCOMPUT SYST LTD 发明人 MIYAZAKI CHUICHI;AKIYAMA YUKIJI;SHIBAMOTO MASAKUNI;SHIMOISHI TOMOAKI;ANJO ICHIRO;NISHI KUNIHIKO;NISHIMURA ASAO;TANAKA HIDEKI;KIMOTO RYOSUKE;TSUBOSAKI KUNIHIRO;HASEBE AKIO
分类号 H01L21/60;H01L21/50;H01L21/98;H01L23/12;H01L23/28;H01L23/48;H01L23/495;H01L23/498;H01L23/50;H01L27/105 主分类号 H01L21/60
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