发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要 PROBLEM TO BE SOLVED: To facilitate increase in operating speed and save power consumption at low cost in a subquarter micron range. SOLUTION: Two MOS transistors, in each of which first and second gate electrodes 14A and 16A are arranged in parallel with each other, and a first n-type drain diffusion layer 19 on the first gate electrode 14A side is connected in series with a second n-type source diffusion layer 20 on the second gate electrode 16A side, are formed on a semiconductor substrate 11 composed of p-type silicon. In the semiconductor substrate 11, a first p-type diffusion layer 22 for controlling high-concentration threshold is formed in the source-side section of a channel region below the first gate electrode 14A on the first n-type source diffusion layer 19 side and, at the same time, a second p-type diffusion layer 23 for controlling high-concentration threshold is formed below the second gate electrode 16A on the second n-type source diffusion layer 20 side.
申请公布号 JPH11154710(A) 申请公布日期 1999.06.08
申请号 JP19970353157 申请日期 1997.12.22
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 HIROKI AKIRA;ODANAKA SHINJI
分类号 H01L29/78;H01L21/265;H01L21/8238;H01L27/092;(IPC1-7):H01L21/823 主分类号 H01L29/78
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