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发明名称
SEMICONDUCTOR MEMORY DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH11204750(A)
申请公布日期
1999.07.30
申请号
JP19980002079
申请日期
1998.01.08
申请人
MITSUBISHI ELECTRIC CORP
发明人
URABE TAKASHI
分类号
H01L27/108;H01L21/8242;(IPC1-7):H01L27/108;H01L21/824
主分类号
H01L27/108
代理机构
代理人
主权项
地址
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