| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a projection optical system wherein asymmetrical components of various aberrations are corrected. SOLUTION: After correcting symmetrical components of various aberrations of a projection optical system PL, random components (asymmetrical components) of the residual aberrations of the system PL are measured. An optical member, having a prescribed refracting power, is selected as a processed member 10 from among optical members constituting the system PL, and such a surface profile having uneven distribution to have the random components of the member 10 cancel out is calculated, based on the measured random components of the various aberrations of the system PL. A member 10 is removed from the system PL and processed, in such a manner that a processed surface 10a thereof will have the calculated uneven surface profile having uneven distribution. The processed member 10 is placed along the optical path of the system PL again.
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