| 摘要 |
PROBLEM TO BE SOLVED: To support a large volume of wafers and to thereby prevent manufacturing cost from increasing by providing a base member and a support member for supporting multiple rows of wafers, each row having a plurality of wafers arranged at intervals from each other above the base member. SOLUTION: A motor 170 which is a rotating means is attached to a bottom plate 101 of a port 100 via a rotary shaft 171, whereby wafers on the plate 101 is caused to rotate as the motor 170 rotates the plate 101. Struts 110, 121, 122 and 123 extend upright substantially in parallel with one another. The strut 110 has notches 111 and 112, formed at intervals in both vertical and horizontal directions in the peripheral surface. The notches 111 supports wafers 152, and the notches 112 support wafers 153. The strut 110 supports three rows of wafers. The strut 121 has a plurality of support rods 131, in order to support the wafers 153 at intervals separating each other.
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