发明名称 MASS SPECTROSCOPE AND MASS SPECTROMETRY
摘要 PROBLEM TO BE SOLVED: To stably measure a hydride generating element with high sensitivity wherein, with an element contained in a measurement sample is combined with hydrogen to generate a gaseous hydride, the gaseous hydride is guided into a plasma ion source mass spectrometer for measuring the hydride generating element. SOLUTION: A hydride generating device is connected to the plasma ion source mass spectrometer to measure a hydride generating element. Here, the flow rate of gas guided into the plasma ion mass spectrometer from the hydride generating device is adjusted.
申请公布号 JP2002260572(A) 申请公布日期 2002.09.13
申请号 JP20010054147 申请日期 2001.02.28
申请人 HITACHI LTD;HITACHI SCI SYST LTD 发明人 YAMAMOTO KAZUKO;SHIRASAKI TOSHIHIRO;YONETANI AKIRA;SAKAMOTO HIDEYUKI;OKUMOTO TOYOJI
分类号 G01N27/62;H01J49/04;H01J49/10;H01J49/26;(IPC1-7):H01J49/04 主分类号 G01N27/62
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