发明名称 PLASMA MODIFICATION OF ORGANIC FILMS
摘要 Organic thin films are being exploited for a number of applications rangi ng from solar cells to organic light-emitting diodes (OLEDs). In such devices i t is necessary to form a high quality electrical contact with the organic film of interest. The ability of a metal contact to stick to an organic film is ofte n limited. This can be particularly problematic as evidenced by the deleterious formati on of dark spots in OLEDs. We have shown that an organic film exposed to a plasma treatment demonstrates improved wettability, an enhanced sticking coefficient and better adhesion to a metal film thereafter deposited. It is further believed that this process leads to an improved electrical contact and suppression of dark spot formation. Thus, an increase in the lifetime of OLE Ds and other electrical devices incorporating organic thin films is anticipated .
申请公布号 CA2384729(A1) 申请公布日期 2003.11.09
申请号 CA20022384729 申请日期 2002.05.09
申请人 THE UNIVERSITY OF WESTERN ONTARIO 发明人 NORTON, PETER R.;GRANDIN, H. MICHELLE
分类号 C23C14/02;C23C14/20;H01L51/52;H01L51/56 主分类号 C23C14/02
代理机构 代理人
主权项
地址