Anordning med flere køleceller til køling af halvledere

摘要

A liquid-cooled plate (3) is cooled by liquid, which is guided along the plate (3) by means of a distributing element (4) comprising cells (7) having a liquid inlet (5) and a liquid outlet (6). It is desired to lower the heat gradient over the plate. This is achieved by making the liquid guided along the plate turbulent by changing the direction of flow.