| 摘要 |
A wafer lifter is provided to prevent or minimize contamination and failure of a driving motor by using a protective cover for preventing contamination of a shaft. A driving motor(150) includes a circular gear of a predetermined diameter in order to rotate the circular gear. A shaft(160) is moved vertically by rotatory power of the driving motor. A protective cover(180) is used for covering the shaft in order to prevent contamination of the shaft. The protective cover is formed of a transparent material. A gear rack(140) is used for converting rotational motion to linear reciprocating motion. A lifter housing(130) is used for guiding the vertical motion of the shaft.
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