发明名称 MIRROR DEVICE, MIRROR ARRAY, OPTICAL SWITCH, MIRROR DEVICE MANUFACTURING METHOD AND MIRROR SUBSTRATE MANUFACTURING METHOD
摘要 <p>A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1 - 103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.</p>
申请公布号 EP1835324(A1) 申请公布日期 2007.09.19
申请号 EP20050822402 申请日期 2005.12.28
申请人 NIPPON TELEGRAPH AND TELEPHONE CORPORATION 发明人 SHIMOKAWA, FUSAO;UCHIYAMA, SHINGO;YAMAGUCHI, JOHJI;SATO, MAKOTO;SASAKURA, KUNIHIKO;MORITA, HIROFUMI;INAGAKI, SHUICHIRO;MACHIDA, KATSUYUKI;ISHII, HIROMU;MURAKAMI, MAKOTO
分类号 G02B26/08;B81B3/00 主分类号 G02B26/08
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