发明名称 |
Surface inspection apparatus, polarization illuminating device and light-receiving device |
摘要 |
A surface inspection apparatus includes: a light source unit that emits a divergent light flux of predetermined linearly polarized light to be used to illuminate a test substrate; a first optical member that allows the divergent light flux of the predetermined linearly polarized light to enter therein with a predetermined angle of incidence and then guides a light flux to the test substrate; a second optical member that allows a light flux from the test substrate to enter therein, emits a convergent light flux thereof with a predetermined angle of emergence and forms an image at a specific surface; an extraction unit that extracts linearly polarized light in the convergent light flux from the second optical member, which is perpendicular to the predetermined linearly polarized light; a light-receiving unit that receives an image of the test substrate formed via the second optical member and the extraction unit; and at least one polarization correcting member disposed within a light path extending between the light source unit and the light-receiving unit, which corrects a disruption of a polarization plane attributable to the first optical member and the second optical member.
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申请公布号 |
US7307725(B2) |
申请公布日期 |
2007.12.11 |
申请号 |
US20050150385 |
申请日期 |
2005.06.13 |
申请人 |
NIKON CORPORATION |
发明人 |
OOMORI TAKEO;HIROSE HIDEO;NAKAJIMA YASUHARU;CHIAKI KENZO;SATOU TATSUMI |
分类号 |
G01J4/00;G01N21/21;G01N21/88;G01N21/95;G01N21/956;G02B5/30 |
主分类号 |
G01J4/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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