发明名称 Methods and apparatus for translated wafer stand-in tester
摘要 A translated wafer stand-in tester (TWST), being a hybrid apparatus capable of emulating the form factor and some or all behaviors of a translated wafer under test, which is operable to store, quantify, encode and convey, either directly or remotely, data from a testing system, including but not limited to pad pressure, electrical contact and temperature. The TWST may include several stacked and attached layers,, at least one internal layer including electronic components operable to interact with a test system.
申请公布号 US2008218192(A1) 申请公布日期 2008.09.11
申请号 US20070810951 申请日期 2007.06.06
申请人 JOHNSON MORGAN T 发明人 JOHNSON MORGAN T.
分类号 G01R35/00 主分类号 G01R35/00
代理机构 代理人
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