| 摘要 |
An optical switch array comprises a (110) silicon substrate integrating a plurality of (111) silicon planar plates, a plurality of flexural silicon strips and a plurality of microchannels therein. The (111) silicon planar plates are coated with a reflective layer on both opposite surfaces and are used as double-sided mirrors. Each silicon strip vertically supports a (111) silicon planar plate and can be electrically bent up to lift the (111) silicon planar plates out of the (110) silicon substrate. The microchannels are oriented to a (111) silicon planar plate at a 135 or 45 degree angle. Each microchannel holds an optical fiber or a cylindrical lens therein. A passive alignment can be realized between the optical fibers, the cylindrical lenses and the (110) silicon planar plates.
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