发明名称 |
Method for producing package, method for producing electronic device, and electronic device |
摘要 |
A method for producing a package includes preparing a base substrate provided with a low-melting glass and a lid, defoaming the low-melting glass by heating the low-melting glass to a temperature equal to or higher than the pour point in a reduced pressure atmosphere, and joining the base substrate and the lid to each other by superimposing the base substrate and the lid on each other through the low-melting glass, and then heating the low-melting glass to a temperature equal to or higher than the pour point in a reduced pressure atmosphere. |
申请公布号 |
US9370106(B2) |
申请公布日期 |
2016.06.14 |
申请号 |
US201313962201 |
申请日期 |
2013.08.08 |
申请人 |
Seiko Epson Corporation |
发明人 |
Kamakura Tomoyuki |
分类号 |
H05K5/06;H05K1/18;C04B37/04;H03H9/10;C04B37/00;H05K1/02 |
主分类号 |
H05K5/06 |
代理机构 |
Harness, Dickey & Pierce, P.L.C. |
代理人 |
Harness, Dickey & Pierce, P.L.C. |
主权项 |
1. An electronic device comprising:
a base substrate; a lid joined to the base substrate and defining an internal space therebetween; and a functional device disposed in the internal space, wherein the lid is formed from a low-melting glass from which gas is removed so that the low-melting glass is in a dense state. |
地址 |
JP |