| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an on-chip color filter having a planarizing film without spoiling optical characteristics.SOLUTION: The method for manufacturing an on-chip color filter comprises the steps of: applying a color resist on a base material to form a pattern having through holes in the color resist; forming a planarizing film on the base material and the color resist; applying a water-soluble polymer on the planarizing film; applying a positive resist on the water-soluble polymer to remove the positive resist inside the through holes; dry etching the water-soluble polymer inside the through holes and the planarizing film; and releasing the remaining water-soluble polymer by pure water or alcohol after the dry etching.SELECTED DRAWING: Figure 1 |
