| 发明名称 |
ALIGNMENT CHECKING APPARATUS AND INTEGRATED CIRCUIT INCLUDING THE SAME |
| 摘要 |
An apparatus for checking alignment and an integrated circuit including the same are disclosed. The apparatus includes a center pad, an edge pad configured to surround the center pad and including an opening in at least one side, and a connection wiring configured to pass through the opening and electrically couple the center pad and an internal circuit. |
| 申请公布号 |
US2016178666(A1) |
申请公布日期 |
2016.06.23 |
| 申请号 |
US201514663684 |
申请日期 |
2015.03.20 |
| 申请人 |
SK hynix Inc. |
发明人 |
OH Sang Mook |
| 分类号 |
G01R1/067;G01R31/28 |
主分类号 |
G01R1/067 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An alignment checking apparatus comprising:
a center pad; an edge pad configured to surround the center pad and including an opening in at least one side; and a connection wiring configured to pass through the opening and electrically couple the center pad and an internal circuit. |
| 地址 |
Icheon-si Gyeonggi-do KR |
