发明名称 |
Silicon DBR structure-integrated light element, and preparation method |
摘要 |
The present invention relates to a silicon DBR structure-integrated light device, and a preparation method thereof, and more specifically, to a silicon DBR structure-integrated light device or vertical cavity light emitting diode, and a preparation method thereof, enabling preparation by a small number of layers and capable of reducing process time and costs due to a large contrast in refractive index of a silicon DBR structure formed by depositing silicon in a slanted or vertical manner. |
申请公布号 |
US9397479(B2) |
申请公布日期 |
2016.07.19 |
申请号 |
US201214376452 |
申请日期 |
2012.11.30 |
申请人 |
GWANGJU INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
Lee Yong-Tak;Jang Sung Joon;Song Young Min |
分类号 |
H01S5/183;H01S5/187;H01L33/10 |
主分类号 |
H01S5/183 |
代理机构 |
Hauptman Ham, LLP |
代理人 |
Hauptman Ham, LLP |
主权项 |
1. A silicon distributed Bragg reflector (DBR) structure-integrated light device, comprising:
a bottom reflector layer formed by alternately stacking two semiconductor material layers having different indices of refraction; an n-type ohmic contact layer formed on an upper surface of the bottom reflector layer; an active layer formed on an upper surface of the n-type ohmic contact layer, and configured to generate light through recombination of electrons and holes injected through at least one oxidizable layer having a current injection hole formed at a center thereof, wherein the at least one oxidizable layer is encompassed by the active layer; a p-type ohmic contact layer formed on an upper surface of the active layer; a top reflector layer formed on an upper surface of the p-type ohmic contact layer and having a silicon DBR structure in which at least one first silicon layer and at least one second silicon layer having different indices of refraction are alternately stacked; and n-type and p-type electrodes formed on the upper surfaces of the n-type and p-type ohmic contact layers, respectively, wherein the first silicon layer has a lower index of refraction than the second silicon layer and is obliquely deposited on the p-type ohmic contact layer to have a varying index of refraction by adjusting an inclination of the first silicon layer, and the second silicon layer is deposited perpendicular to a plane of the p-type ohmic contact layer, and wherein the active layer directly contacts with each of the p-type ohmic contact layer and the n-type ohmic contact layer. |
地址 |
Gwangju KR |