发明名称 VERTICALLY STACKED PIP/MIM PARALLEL CAPACITOR
摘要 The present specification discloses a capacitor which occupies a small space through a vertically stacked PIP/MIM parallel capacitor and has a high value. In the PIP/MIM parallel capacitor according to the present specification, a PIP capacitor can be stacked on a lower end part. An MIM capacitor can be stacked on the upper part. The capacitor comprises polysilicon layers, insulating layers, and metal layers.
申请公布号 KR101660499(B1) 申请公布日期 2016.09.29
申请号 KR20160001855 申请日期 2016.01.07
申请人 DAVITDYNE CO. 发明人 GANG, YUNG JIN
分类号 H01L49/02;H01L21/768;H01L27/24;H03F3/181;H03H7/09;H04R3/06 主分类号 H01L49/02
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