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发明名称
Mixing gas manufacturing method of BCl3
摘要
본 발명은 중량법을 이용한 삼염화붕소의 혼합 가스 제조 방법에 관한 것이다.
申请公布号
KR20160145943(A)
申请公布日期
2016.12.21
申请号
KR20150082344
申请日期
2015.06.11
申请人
주식회사 에이앤엘머트리얼즈
发明人
김승철
分类号
C01B35/06
主分类号
C01B35/06
代理机构
代理人
主权项
地址
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