| 摘要 |
PURPOSE:To directly detect the concn. of a silyl radial (SiH3), by detecting light absorption at 250-254nm. CONSTITUTION:After a substrate, to which an amorphous silicon membrane should be formed, is mounted to the substrate mount stand in a reaction chamber 2, air in the reaction chamber is exhausted by a vacuum pump not shown in a drawing through a gas exhaust port 4 and specimen gas is subsequently injected in the reaction chamber 2 through a gas injection port 3. The specimen gas may be sealed or may be a flow state. Next, exciting energy, for example, ultraviolet laser beam is allowed to irradiate the interior of the reaction chamber 2 from an exciting source 1 to decompose the specimen gas and beam is allowed to irradiate the interior of the reaction chamber 2 in a pulse like state from a light source 6 synchronized by a control operational processing apparatus 12. The pulse beam passed through the decomposed gas in the reaction chamber 2 is spectrally diffracted by a spectroscope 9 and beam with a wavelength of 250-254nm is photoelectrically converted by a photomultiplier tube 11 and a detection signal is outputted to the control operational processing apparatus 12. After the signal processing by the control operational processing apparatus, 12 beam absorption is recorded on a recorder 13. |
