| 摘要 |
PURPOSE:To obtain a hardly bent dry plate of high accuracy by sticking a light shielding film and a resist film on one side of a transparent substrate and forming a thin film on the other side. CONSTITUTION:A light shielding film 1b is stuck on one side of a transparent substrate 1a made of a quartz glass plate and a resist film 1c is formed on the film 1b. A thin film 2 for straightening the substrate 1a bent by the films 1b, 1c is formed on the other side of the substrate 1a. The resist film 1c of the resulting dry plate 1 is exposed, the thin film 2 is removed by etching with an etching soln. for the film 2 and the film 1c is developed. The light shielding film 1b is then etched to produce a photomask. Thus, the hardly bent photomask is easily obtd. |
