| 摘要 |
A silicon-on-insulator MOS transistor is disclosed which has an implanted region on the source side of the gate electrode for making contact to the body node. A contact region of the same conductivity type as the body node, (for example, a p+ region for an n-channel transistor) is formed within the source region in a self-aligned fashion relative to the gate electrode. Ohmic connection is then made between the abutting source region and the contact region, for example by way of silicidation. Since the contact region is of the same conductivity as the body node, a non-rectifying ohmic contact is made between the source and body nodes of the transistor. For SOI CMOS technology, no additional mask steps are required for formation of the contact, as the source/drain implant masks required for the masking of opposite conductivity type regions can be used for the formation of the contact region.
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