发明名称 TEMPERATURE-CONTROLLED, MICROMACHINED ARRAYS FOR CHEMICAL SENSOR FABRICATION AND OPERATION
摘要 <p>Planar forms of chemically-sensitive materials have been combined, under temperature control, with the pixels of a specially-designed micro-hotplate array to produce a miniature device capable of analyzing chemical mixtures. The device uses integrated multiple elements having different adsorption properties and temperatures to collectively achieve chemical selectivity in sensing. The method of making and using the device of the present invention can be readily adapted for commercial production to manufacture a range of devices with improved sensing performance.</p>
申请公布号 WO1994010559(A2) 申请公布日期 1994.05.11
申请号 US1993010261 申请日期 1993.10.26
申请人 发明人
分类号 主分类号
代理机构 代理人
主权项
地址