| 发明名称 |
Thioxanthone sensitizer for radiation sensitive polyimides |
| 摘要 |
The present invention relates to thioxanthone sensitizers for radiation sensitive polyimide compositions for use in manufacturing integrated circuits such as chips, thin film packaging and printed circuit boards.
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| 申请公布号 |
US5391464(A) |
申请公布日期 |
1995.02.21 |
| 申请号 |
US19930174650 |
申请日期 |
1993.12.28 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
AFZALI-ARDAKANI, ALI;BROCK, PHILLIP J.;DAWSON, DANIEL J.;GELORME, JEFFREY D. |
| 分类号 |
G03F7/031;G03F7/038;(IPC1-7):G03C1/725;G03C1/73 |
主分类号 |
G03F7/031 |
| 代理机构 |
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| 主权项 |
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