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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH08321605(A)
申请公布日期
1996.12.03
申请号
JP19950126337
申请日期
1995.05.25
申请人
YOKOGAWA ELECTRIC CORP
发明人
NAKAYA MINORU
分类号
H01L21/28;H01L21/336;H01L29/78;(IPC1-7):H01L29/78
主分类号
H01L21/28
代理机构
代理人
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地址
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