| 摘要 |
<p>Normalized measured temperatures are calculated, these being obtained by normalizing measured temperatures, which have been measured by temperature sensors provided so as to correspond to a plurality of heaters, by reference target temperatures. A reference value is calculated based upon these normalized measured temperatures. Reference-value deviations between the reference value and normalized measured temperatures are calculated, and deviation differential values, which are obtained by differentiating these reference-value deviations with respect to time, are calculated. Correction gains are calculated based upon the reference-value deviations and deviation differential values. Normalized deviations are calculated, these being obtained by normalizing deviations between respective reference target temperatures and measured temperatures by the reference target temperatures. Degrees of settling are calculated based upon these normalized deviations. Correction quantities are calculated based upon the respective correction gains and degrees of settling. Respective target temperatures are calculated by correcting the reference target temperatures using the correction quantities. <IMAGE></p> |
