| 发明名称 |
Sample carriage for scanning probe microscope |
| 摘要 |
<p>A sample carriage, for receiving a sample to be scanned and positionable in a scanning probe microscope, is used for physically decoupling the sample from the scanning probe microscope assembly. The sample carriage, constructed from low thermal coefficient material, is physically decoupled by releasably clamping a sample carriage to a bridge support. <IMAGE></p> |
| 申请公布号 |
EP0597622(B1) |
申请公布日期 |
1997.01.29 |
| 申请号 |
EP19930308790 |
申请日期 |
1993.11.03 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
ABRAHAM, DAVID WILLIAM;HAMMOND, JAMES MICHAEL;KLOS, MARTIN ALLEN;ROESSLER, KENNETH GILBERT;STOWELL, ROBERT MARSHALL;WICKRAMASINGHE, HEMANTHA KUMAR |
| 分类号 |
G01B7/34;G01B21/30;G01Q70/04;H01J37/20;H01J37/28;(IPC1-7):G01N27/00;G01B5/00;B23Q1/28 |
主分类号 |
G01B7/34 |
| 代理机构 |
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代理人 |
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| 主权项 |
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