LASER ANNEALING DEVICE,申请号JP19960038995-传众专利搜索

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发明名称	LASER ANNEALING DEVICE
摘要
申请公布号	JPH09213652(A)	申请公布日期	1997.08.15
申请号	JP19960038995	申请日期	1996.02.01
申请人	SEMICONDUCTOR ENERGY LAB CO LTD;SHARP CORP	发明人	KUSUMOTO NAOTO;MIYAMOTO TADAYOSHI;HOSODA GOJI;TAKEUCHI AKIRA
分类号	H01L21/20;H01L21/268;(IPC1-7):H01L21/268	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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