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发明名称
SEMICONDUCTOR MANUFACTURING APPARATUS AND CONTROL METHOD THEREFOR
摘要
申请公布号
JPH11251297(A)
申请公布日期
1999.09.17
申请号
JP19980049294
申请日期
1998.03.02
申请人
NEC KYUSHU LTD
发明人
HAMAGUCHI TSUTOMU
分类号
H01L21/302;C23F4/00;H01L21/3065;(IPC1-7):H01L21/306
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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