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发明名称
ION BEAM NEUTRALIZING METHOD FOR ION IMPLANTATION METHOD
摘要
申请公布号
JPH11250852(A)
申请公布日期
1999.09.17
申请号
JP19980049293
申请日期
1998.03.02
申请人
NEC YAMAGATA LTD
发明人
FUJITA YOSHIAKI
分类号
H01J37/20;H01J37/317;H01L21/265;(IPC1-7):H01J37/317
主分类号
H01J37/20
代理机构
代理人
主权项
地址
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