DEVICE HAVING A SWITCH COMPRISING A CHROMIUM LAYER AND METHOD FOR DEPOSITING CHROMIUM LAYERS BY SPUTTERING,申请号EP19960900412-传众专利搜索

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发明名称	DEVICE HAVING A SWITCH COMPRISING A CHROMIUM LAYER AND METHOD FOR DEPOSITING CHROMIUM LAYERS BY SPUTTERING
摘要
申请公布号	EP0760020(B1)	申请公布日期	1999.11.03
申请号	EP19960900412	申请日期	1996.01.29
申请人	KONINKLIJKE PHILIPS ELECTRONICS N.V.	发明人	VINK, TEUNIS JOHANNES;WALRAVE, WILLEM
分类号	C23C14/34;C23C14/16;C23C14/18;C23C14/54;H01L21/28;H01L21/283;H01L21/285;H01L21/3205;H01L23/52;H01L29/45;(IPC1-7):C23C14/54	主分类号	C23C14/34
代理机构		代理人
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