发明名称 Semiconductor device with microwave bipolar transistor
摘要 A semiconductor device with a bipolar transistor that decreases the parasitic capacitance between a base connection layer and a collector region is provided. This device is comprised of a semiconductor substrate having a main surface, a collector region formed in the substrate, a base region formed in the substrate, an emitter region formed in the substrate, a first dielectric layer formed on the main surface of the substrate to be overlapped with the collector region, a conductive layer formed on the first dielectric layer and applied with a specific electric potential, a second dielectric layer formed to cover the conductive layer, a base connection layer formed on the second dielectric layer and electrically connected to the base region, and a base electrode electrically connected to the base connection layer. The emitter region, the base region, and the collector region constitute a bipolar transistor. The conductive layer serves as a shielding electrode that prevents a parasitic capacitance between the collector region and the base connection layer from occurring using the Faraday shielding effect.
申请公布号 US5986326(A) 申请公布日期 1999.11.16
申请号 US19980105409 申请日期 1998.06.26
申请人 NEC CORPORATION 发明人 KATO, HIROSI
分类号 H01L29/73;H01L21/331;H01L29/732;(IPC1-7):H01L29/73 主分类号 H01L29/73
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