发明名称 EXHAUST SYSTEM OF A SPINNER EQUIPMENT
摘要 PURPOSE: An exhaust system of a spinner equipment is provided to prevent grain materials from being accumulated to block an exhaust pipe wherein the grain materials are generated by a reaction between chemical materials exhausted from the exhaust pipe in a bake process of the spinner equipment, and to prevent environmental pollution caused by the grain materials. CONSTITUTION: An exhaust system of a spinner equipment handling an exhaust of a low pressure adhesion hot plate chamber(23), a hot plate chamber(24) and a cool plate chamber(25), comprises an additional exhaust pipe connected to the low pressure adhesion hot plate chamber and an additional exhaust pipe connected to the hot plate chamber and cool plate chamber.
申请公布号 KR20000072890(A) 申请公布日期 2000.12.05
申请号 KR19990015832 申请日期 1999.05.03
申请人 SAMSUNG ELECTRONICS CO, LTD. 发明人 SONG, GYEONG SU
分类号 H01L21/027;(IPC1-7):H01L21/027 主分类号 H01L21/027
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