发明名称 |
PROBE CARD, PROBE PIN, AND METHOD FOR MANUFACTURING THE PROBE CARD AND THE PROBE PIN |
摘要 |
PROBLEM TO BE SOLVED: To provide a probe card where fine probe pins are arranged with a fine pitch. SOLUTION: The probe card 10 has an amorphous alloy layer 18, a metal layer 20, and a projection 24, and comprises a probe pin 12 that is at least partially curved, a retention board 16 for retaining one end of the probe pin 12, and a transmission line 14 that is provided on the retention board 16 and is electrically connected to the probe pin 12.
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申请公布号 |
JP2002277485(A) |
申请公布日期 |
2002.09.25 |
申请号 |
JP20010078754 |
申请日期 |
2001.03.19 |
申请人 |
SHIMOKAWABE AKIRA |
发明人 |
WADA KOICHI;KITATSUME HIDENORI;MIYAZAKI MASARU;MOTOYAMA SHINICHI;SHIMOKAWABE AKIRA;HATA SEIICHI |
分类号 |
G01R31/26;G01R1/073;H01L21/66;(IPC1-7):G01R1/073 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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