发明名称 PROBE CARD, PROBE PIN, AND METHOD FOR MANUFACTURING THE PROBE CARD AND THE PROBE PIN
摘要 PROBLEM TO BE SOLVED: To provide a probe card where fine probe pins are arranged with a fine pitch. SOLUTION: The probe card 10 has an amorphous alloy layer 18, a metal layer 20, and a projection 24, and comprises a probe pin 12 that is at least partially curved, a retention board 16 for retaining one end of the probe pin 12, and a transmission line 14 that is provided on the retention board 16 and is electrically connected to the probe pin 12.
申请公布号 JP2002277485(A) 申请公布日期 2002.09.25
申请号 JP20010078754 申请日期 2001.03.19
申请人 SHIMOKAWABE AKIRA 发明人 WADA KOICHI;KITATSUME HIDENORI;MIYAZAKI MASARU;MOTOYAMA SHINICHI;SHIMOKAWABE AKIRA;HATA SEIICHI
分类号 G01R31/26;G01R1/073;H01L21/66;(IPC1-7):G01R1/073 主分类号 G01R31/26
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