发明名称 LITHIUM NIOBATE PIEZOELECTRIC SINGLE CRYSTAL, PIEZOELECTRIC VIBRATOR USING THE SAME AND PIEZOELECTRIC VIBRATING GYRO
摘要 <P>PROBLEM TO BE SOLVED: To provide a piezoelectric single crystal which is unlikely to be affected by a support structure for fixing a piezoelectric vibrator and a piezoelectric vibrator using it, and to provide a piezoelectric vibrating gyro. <P>SOLUTION: A piezoelectric single crystal, doped with zinc in the range of &le;5 mol% to lithium niobate, is used for the piezoelectric vibrator, and this piezoelectric vibrator is used for the piezoelectric vibrating gyro. By doping zinc, variations in the electro-mechanical coupling coefficient (k) and the mechanical quality coefficient Qm due to the support mechanism of the piezoelectric vibrator are reduced, the size is reduced, and mass productivity of the piezoelectric vibrator and the piezoelectric gyro can be improved. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005233887(A) 申请公布日期 2005.09.02
申请号 JP20040046163 申请日期 2004.02.23
申请人 NEC TOKIN CORP 发明人 SASAKI ATSUSHI
分类号 C30B29/30;G01C19/56;G01C19/5663;H01L41/08;H01L41/18;H01L41/39;H01L41/41 主分类号 C30B29/30
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