| 摘要 |
<p>An inside of a relay station (10) is permitted to be a substrate storing section (10a), and on facing side walls of the substrate storing section, supporting sections (11) for supporting a plurality of semiconductor wafers are formed. On both sides of the relay station (10), a substrate processing apparatus side opening section (12) and a transferring apparatus side opening section (13) are formed, and these opening sections are provided with a substrate processing apparatus side opening/closing mechanism (14) and a transfer apparatus side opening/closing mechanism (15). A bottom plane (18) of the relay station (10) has a shape of a hoop conforming to the SEMI standards and can be placed on a placing table for placing the hoop. ® KIPO & WIPO 2007</p> |
