发明名称 |
Tunable gas distribution plate assembly |
摘要 |
A gas distribution plate assembly and a method for distributing gas in a processing chamber are provided. In one embodiment, a gas distribution plate assembly includes a tuning plate coupled to a diffuser plate. The tuning plate has a plurality of orifice holes formed therethrough that align with a plurality of apertures formed through the diffuser plate, where the apertures each have a greater sectional area than the holes in the tuning plate. Each aperture is aligned with a respective hole to define gas passages through the gas distribution plate assembly. The tuning plate may be interchanged with a replacement tuning plate to change the gas flow characteristics through the gas distribution plate assembly.
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申请公布号 |
US7270713(B2) |
申请公布日期 |
2007.09.18 |
申请号 |
US20030337483 |
申请日期 |
2003.01.07 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
BLONIGAN WENDELL T.;WHITE JOHN M.;BAGLEY WILLIAM A. |
分类号 |
C23C16/455;G02F1/13;C23C16/44;C23C16/50;C23C16/503;C23C16/505;C23C16/509;C23F1/00;H01J37/32;H01L21/306 |
主分类号 |
C23C16/455 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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