| 摘要 |
<p>A flexible coupler for a vacuum chamber is provided to maintain a constant contact pressure of a spring finger without forming layer by maintaining a tensile force on the spring finger by using a spring and to have small internal resistance in the path of electrical beam. A ring-like first flange(110) is connected to a first vacuum chamber. A ring-like first flange(120) is connected to a second vacuum chamber. A bellows(130) elastically couples the first flange with the second flange. A vacuum state is generated in the bellows. One end of a pipe-like inner tube(140) is coupled with an inner side of the first flange in a length direction. First ends of connecting bars(111), which are elongated in a length direction from the first flange to an interface between the inner tube and the bellows, are fixed on the first flange. A ring-like guide(112) is fixed at second ends of the connecting bars. A ring-like clamp(155) is arranged to move an outer periphery of the inner tube in a length direction along the connecting bar. The clamp is elastically supported to be apart from the guide. One end of a spring finger(150) is fixed on the second flange, while the other end thereof is coupled with a lower end of the clamp. The spring finger is slidingly contacted with a lower portion of the guide and an end portion of the inner tube by the clamp.</p> |
