| 摘要 |
PROBLEM TO BE SOLVED: To reduce an optical route length in interference displacement measurement. SOLUTION: This system is equipped with a sensor head 105 and a measuring lattice 106. The sensor head is equipped with a light source 200 for providing a light beam, a splitter lattice for splitting the light beam into first and second measuring channels 400, 500, a first retroreflector and a second retroreflector 208 constituted so as to retroreflect the first and second measuring channels so as to be returned to the measuring lattice, a first detector array arranged so as to receive the first measuring channel, and a second detector array arranged so as to receive the second measuring channel. The measuring lattice is constituted so that each measuring channel is split into a first arm and a second arm on the first illumination path, and that the first arm and the second arm are recombined on the second illumination path. COPYRIGHT: (C)2008,JPO&INPIT
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