METHOD FOR TREATING OBJECT AND OBJECT TREATMENT SYSTEM
摘要
<p>This invention provides a method for treating an object by applying a mixed-phase fluid containing an inactive gas and/or air, water vapor, and droplets to the object. This method is characterized in that the inactive gas and/or the air and the water vapor are mixed together to provide a mixed gas, and the mixed gas and a liquid are mixed with each other to form the droplets, whereby the property of the mixed gas can be regulated.</p>
申请公布号
WO2009014084(A1)
申请公布日期
2009.01.29
申请号
WO2008JP63006
申请日期
2008.07.18
申请人
WATANABE, MASAO;SANADA, TOSHIYUKI;SHIROTA, MINORI;AQUA SCIENCE CORPORATION;KYUSHU UNIVERSITY, NATIONAL UNIVERSITY CORPORATION;HAYASHIDA, ATSUSHI
