发明名称 |
ARRAY SUBSTRATE, METHOD FOR PRODUCING THE SAME AND DISPLAY APPARATUS |
摘要 |
A method for producing an array substrate is provided. The method includes: forming metal film layers and patterning the metal film layers to form a plurality rows of gate lines and a plurality columns of data lines crossed to each other in the non-display area and forming thin film transistors; forming a pad part at one end of the gate lines or data lines. The process of producing the pad part includes: forming a first insulation layer on the metal film layers by patterning; forming an etching protection layer, a source and drain metal layer and a second insulation layer sequentially by patterning, wherein the first insulation layer, the etching protection layer, the source and drain metal layer and the second insulation layer form a trapezoid stack. |
申请公布号 |
US2016233255(A1) |
申请公布日期 |
2016.08.11 |
申请号 |
US201615133531 |
申请日期 |
2016.04.20 |
申请人 |
BOE Technology Group Co., Ltd. ;Hefei Xinsheng Optoelectronics Technology Co., Ltd. |
发明人 |
Cai Zhenfei;Chen Zhengwei |
分类号 |
H01L27/12 |
主分类号 |
H01L27/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
Beijing CN |